AEROHEAT® is a long-life electric heater, developed based on our superior manufacturing technology of MI cables.
- By arranging a set of multiple panel heaters (panel heater sample shown in the picture below), precise temperature contral can be achieved even with large glass substrates over Generation 8.
- Platen heaters which are essential for semiconductor production equipment and provides fast heatup and surerior surface temperature uniformity.
- With the use of ceramic terminals, it is possible to be connected to a power source in vacuum atmosphere.
Catalog No.: OMC-7006